Tools Used: Microsystems Engineers

Semiconductor process systems

• Atomic layer deposition ALD systems
• Contact mask aligners
• Die saws
• Direct current DC sputtering systems
• Dry etchers
• Electron beam evaporators
• Inductively coupled plasma reactive ion etchers ICP-RIE
• Laser ablation thin film deposition systems
• Parylene coaters
• Photoresist dispensing systems
• Plasma enhanced chemical vapor deposition PECVD systems
• Plasma etchers
• Radio frequency RF sputtering systems
• Spin coaters
• Sputter deposition systems
• Stepper aligners
• Thin film deposition systems
• Vacuum chambers
• Wet chemical etching systems
• Wire bonders