Tools Used: Nanosystems Engineers

Semiconductor process systems

• Atomic layer deposition ALD systems
• Contact mask aligners
• Downstream strippers
• Electron beam evaporators
• Electron beam lithography systems
• Image reversal ovens
• Inductively coupled plasma reactive ion etchers ICP-RIE
• Ion mills
• Low pressure chemical vapor deposition LPCVD systems
• Magnetron sputtering systems
• Mask writers
• Metal-organic chemical vapor deposition MOCVD systems
• Molecular beam epitaxy MBE systems
• Nanoimprint lithography NIL systems
• Oxide etchers
• Parylene deposition systems
• Plasma cleaning systems
• Plasma enhanced chemical vapor deposition PECVD systems
• Sputter coaters
• Ultrasonic cutters
• Wafer bond aligners
• Wafer bonding systems
• Wafer saws
• Wafer spinners
• Wire bonders